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Introduction of new type microwave plasma CVD diamond reactors​


Introduction of new type microwave plasma CVD diamond reactors




(a)
(b)
(c)

(a) first homemade 75kW/915MHz ellipsoidal microwave plasma chemicalvapor deposition (MPCVD) reactor developed for
growing large area high quality diamond film with high growth rate,
(b) 10kW/2.45 GHz TM01 mode circumferential antenna-ellipsoidal cavity type MPCVD reator,
(c) the plasma ignited in the reator


High power microwave CVD diamond reactors with innovative design in the deposition chamber by which the coupling efficiency is enhanced, whilst the contamination to the microwave window is drastically reduced, have been successfully introduced, which include the ellipsoidal as well as the cylindrical type reactors


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